316L VAR, ALD Series Atomic Layer Deposition Diaphragm Valve, Thermal model, Modular Surface-mount Valve, 1.5 in. High Flow C-Seal, 3 ports, Vacuum to 145 psig (10 bar), 32°F to 392°F (0°C to 200°C), 0.62 Cv, NC Actuator, FITOK FC-03 Ultra-High Purity Process Specification

Part Number:ALD6LV-CS15-HF-6-HT-3P-CF3

Specifications

Part Number ALD6LV-CS15-HF-6-HT-3P-CF3 Body Material 316L SS VAR
Port 1 Type C-Seal Port 1 Size 1.5" High Flow
Port 2 Type C-Seal Port 2 Size 1.5" High Flow
Port 3 Type C-Seal Port 3 Size 1.5" High Flow
Flow Coefficient (Cv) 0.62 Max. Working Pressure 145 psig (10 bar)
Min. Working Temperature 32°F (0°C) Max. Working Temperature 392°F (200°C)

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