316L SS VIM-VAR, ALD Series Atomic Layer Deposition Diaphragm Valve, Standard model, Modular Surface-mount Valve, 1.125 in. C-Seal, 2 ports, Vacuum to 145 psig (10 bar), 32°F to 248°F (0°C to 120°C), 0.27 Cv, NC Actuator, Normally Closed Position Sensor, 90° union elbow for 4 mm tube, FITOK FC-03 Ultra-High Purity Process Specification

Part Number:ALD6LW-CS11-4-CF3MCEM4

Specifications

Part Number ALD6LW-CS11-4-CF3MCEM4 Body Material 316L SS VIM-VAR
Port 1 Type C-Seal Port 1 Size 1.125 in.
Port 2 Type C-Seal Port 2 Size 1.125 in.
Flow Coefficient (Cv) 0.27 Max. Working Pressure 145 psig (10 bar)
Min. Working Temperature 32°F (0°C) Max. Working Temperature 248°F (120°C)

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