New Product Launch: FITOK Two-Step Pneumatic Diaphragm Valves

Two-Step Pneumatic Diaphragm Valves

 

Introduction

 

 

FITOK DPT Series Two-Step Pneumatic Diaphragm Valves are used in semiconductor industry to provide rapid switching between low-flow and high-flow modes to relieve pressure rise in the cavity and prevent fluid from flowing rapidly into the cavity and other internal areas of the semiconductor processing machine, thus keeping particles from flying around and contaminating the cavity. Two-Step pneumatic diaphragm valves are more space and cost efficient than the traditional method of regulating pressure by adding bypass pipeline.

 

Features

 

 

  • Fast switching between low and high flow rates
  • Cobalt alloy diaphragm with high strength and corrosion resistance to ensure long cycle life
  • Minimum particle generation and dead space
  • Internally threadless and springless

 

Technical Data

 

 

 
Valve Body Material 316L, 316L VAR
Valve Seat Material PFA, PCTFE
Port Size 1/4"
Flow Coefficient (Cv) High-Flow (HF) Port: 0.27
Low-Flow (LF) Port: 0.02 ~ 0.12
Orifice Size 0.16 in. (4.1 mm)
Working Pressure Vacuum to 145 psig (10 bar)
Working Temperature PFA: 14 ~ 302 °F (-10 ~ 150 °C)
PCTFE: 14 ~ 176 °F (-10 ~ 80 °C)
Wetted Surface Roughness Ra 5 μin. (0.13 μm)
Leak Rate (Helium) Internal ≤ 1×10-9 std cm3/s
External ≤ 1×10-9 std cm3/s

 

Please see the Two-Step Pneumatic Diaphragm Valves Catalog for more information. Should you have any questions, please contact us directly and We will reach you soon.

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