Ultra High Purity Filters

Designed for high purity piping systems

High purity filters are specifically designed to remove fine impurities from fluids in environments that demand exceptionally high cleanliness standards, such as semiconductor manufacturing. FITOK maintains strict control over material selection and manufacturing processes to meet these rigorous cleanliness requirements. In addition,these filters can operate at high flow rates, ensuring fluid purity and quality.

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  • Ultra High Purity Filters, FP Series

    FP Series Ultra High Purity Filters feature a removal rating of 0.003 µm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.

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