Integrated Gas Systems

Integrated systems for gas control in the semiconductor industry

Integrated Gas Systems are used for gas control in the semiconductor industry. These systems use SEMI-compliant surface-mounted components and feature a modular design, reducing device size while simplifying installation and maintenance.

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  • Integrated Gas Systems

    FITOK Integrated Gas System is used to control gas in the semiconductor industry, integrating valves, fittings, and other piping components, as well as other necessary measuring and control instruments. FITOK Integrated Gas System uses SEMI compliant surface-mounted components and is modularly designed. While reducing the size of the device, installation and maintenance become easier.

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