Surface-Mounting Check Valves, CI Series

CI Series Check Valves are suitable for use in integrated gas systems for high purity and ultra high purity applications. Small-sized, these valves significantly save installation space. The poppet design minimizes particle generation. Valve bodies are manufactured from premium materials such as 316L SS and 316L SS VAR, and comply with Ultra High Purity Process (FC-03) requirements. The helium leak rate is ≤ 1 × 10⁻⁹ std·cm³/s. With excellent sealing performance and corrosion resistance, these valves meet the stringent demands of high purity gas systems.

Features

Wetted components electropolished to a surface finish of 5 µin. (0.13 µm) Ra max.
Maximum working pressure: 145 psig (10 bar)
Multiple connection types available
W-seal and C-seal optional

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