Atomic Layer Deposition (ALD) is a method of applying thin films to various substrates with atomic scale precision. As chip node dimensions are continuously shrinking, traditional deposition techniques have reached their limits. Depositing ultra-thin layer at the nanoscale requires Atomic Layer Deposition (ALD) technology, which allows materials to be deposited one atomic layer at a time. ALD series diaphragm valves are used to deliver precise doses of gases during the deposition process used to create semiconductor chips.

DQ Series Low Pressure Diaphragm Valves offer low internal volume, minimal particle generation, and no dead space for easy flow path sweeping. A contained seat resists swelling and contamination.  A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Metal-to-metal seating prevents external leakage. A handle with a window allows for easy open/close identification. Various connection types, sizes, and seat materials are available. Wetted surfaces are electropolished to Ra 5 μin. (0.13 μm), making these valves suitable for high purity and ultra high purity applications.

DP Series Low Pressure Pneumatic Diaphragm Valves feature minimal internal volume and no dead space. The absence of internal wetted threads or springs minimizes particle generation and entrapment, ensuring high purity. A fully contained seat resists swelling and contamination. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. A metal-to-metal seal prevents external leakage. Various connection types, sizes, and seat materials are available. Electropolished wetted surfaces achieve a roughness of Ra 5 μin. (0.13 μm), suitable for high purity and ultra high purity applications.

DPT Series Two-Step Pneumatic Diaphragm Valves are designed for high purity and ultra high purity applications, providing a “soft start” by rapidly switching between low and high flow modes. The absence of wetted threads or springs minimizes particle generation and entrapment, ensuring high purity. Minimal particle generation and dead space improve purity. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Various connection types and sizes are available.

DH Series High Pressure Springless Diaphragm Valves incorporate a multi-layered cobalt alloy and BeCu diaphragm for high strength and corrosion resistance, ensuring long cycle life. An arc seat enhances sealing. Maximum working pressure is 3000 psig (206 bar). Manual and pneumatic actuators are optional, with position sensors available for pneumatic versions. Various connection types, sizes, and seat materials are offered.

DM Series High Pressure Spring Diaphragm Valves feature an all-metal containment design with no packing and reduced seat volume. A fully contained soft-seat stem tip enables repetitive shutoff. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Maximum working pressure is 3500 psig (241 bar). Manual and pneumatic actuators are optional, with a position indicator ring for lever handles and optional position sensors for pneumatic versions. Various connection types, sizes, and seat materials are available.

DS Series High Pressure Compact Diaphragm Valves feature a compact design with reduced internal volume, minimal particle generation, and minimal dead space. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. The minimized component count simplifies maintenance. The no-packing design suits high purity gas applications, while low operating torque enables easy opening and closing. Maximum working pressure reaches 4500 psig (310 bar). Manual and pneumatic actuators are available, along with various connection types, sizes, seat materials, and a 2-valve 3-way block type option.

DR Series Low Pressure Medium Flow Diaphragm Valves feature a fully contained seat for excellent resistance to swelling and contamination. With no dead space, they facilitate easy purging. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Working pressure ranges from vacuum to 145 psig, with a Cv of up to 0.7, making them ideal for medium flow applications. Manual and pneumatic actuators are optional, with a manual handle featuring a window. Various connection types, sizes, and seat materials are available.

DV Series Low Pressure High Flow Diaphragm Valves feature a metal-to-metal seal construction for superior leak tightness. The absence of springs and threads in wetted areas enhances cleanliness. A tied-diaphragm design provides positive stem retraction. Working pressure ranges from vacuum to 300 psig, with a Cv of up to 2.8, making these valves ideal for high flow applications. Low operating torque and a stem position indicator enhance usability. Manual and pneumatic actuators are optional. Various connection types, sizes, and seat materials are available.

DL Series Low Pressure Ultra High Flow Diaphragm Valves incorporate a cobalt alloy diaphragm, offering high strength and corrosion resistance for long cycle life. The absence of internal wetted threads or springs minimizes particle generation and entrapment, enhancing cleanliness. Maximum working pressure is 300 psig (20.6 bar), with a Cv of up to 13, ideal for ultra high flow applications. Manual and pneumatic actuators are optional. The manual version requires five and a half turns from fully open to closed with low torque. Various connection types, sizes, and seat materials are available.

DF Series High-Pressure, High-Flow Diaphragm Valves utilize a spring-type design, providing a high flow coefficient suitable for high pressure and high flow applications. A cobalt alloy diaphragm ensures durability and corrosion resistance. These valves support a maximum working pressure of 3500 psig (241 bar). Manual and pneumatic actuators are optional, with position sensors available for pneumatic versions. Various connection types, sizes, and seat materials are offered.

DE Series Economic Diaphragm Valves feature a cobalt alloy diaphragm, offering high strength and corrosion resistance to ensure long cycle life. No springs or threads in wetted areas improves cleanliness. These valves offer minimal particle generation, minimal dead space, and a wetted surface roughness of Ra 5 μin. (0.13 μm). Metal gasket face seal fitting connection is suitable for ultra high purity gas systems. Working pressure ranges from vacuum to 150 psig (10 bar), with a temperature range of -10 to 176 °F (-23 to 80 °C). Manual and pneumatic actuators are optional.

DK Series High Temperature Diaphragm Valves feature a thermal immersion design for applications up to 482 °F (250 °C). A metal seat provides excellent resistance to swelling and contamination, while all-metal wetted parts offer broad chemical compatibility. A cobalt alloy diaphragm ensures long cycle life with high strength and corrosion resistance. Minimal particle generation and dead space facilitate purging. Various connection types and sizes are available.

DIM Series Diaphragm Valves use SEMI-compliant surface mounting. Featuring either W-seal or C-seal metal hard seals between the valve and the substrate, these diaphragm valves can be installed in integrated gas systems. They support a maximum working pressure of 145 psig (10 bar). A cobalt alloy diaphragm enhances strength and corrosion resistance. The no-packing diaphragm seal ensures high purity, while the absence of dead space facilitates easy purging. Wetted components are electropolished to Ra 5 μin. (0.13 μm).