Vacuum Generators

Create vacuum environments by utilizing the Venturi effect

Vacuum generators create vacuum environments by utilizing the Venturi effect. They are primarily used to purge piping systems and create vacuum conditions, making them widely used in the semiconductor industry. FITOK’s VGB and VGM series vacuum generators feature an all-welded construction, ensuring enhanced sealing performance and extended service life. The VGC series integrates a vacuum venturi, air-actuated valve, and check valve into a compact design.

Browse by Category

  • Vacuum Generators, VGB and VGM Series

    VGB and VGM Series Vacuum Generators feature an all-welded construction for improved sealing performance and extended service life. They are designed to create a vacuum and establish suction for purging piping systems,which are widely used in the semiconductor industry. The inlet and vent ports of the VGB series offer multiple options, while the VGM series specifies the sizes and types of inlet and vent ports. Maximum vacuum up to -26 in. Hg (-88 kPa), working temperature range from -40 to 160 °F (-40 to 71 °C), and leak rate (helium) < 2x10-10 std cm3/s. Wetted surface roughness machine finished to Ra 15 µin. (0.38 µm). These vacuum generators are ultrasonic and DI water cleaned and finally packaged in ISO class 4 (FS 209E class 10 equivalent) cleanroom for semiconductor ultra-high purity.

  • Vacuum Generators, VGC Series

    VGC Series Vacuum Generator Modules are designed to create a vacuum and establish suction to purge piping systems, which are widely used in the semiconductor industry. The VGC series integrate vacuum venturi, air actuated valve and check valve to provide a compact design. Air actuated valve controls the nitrogen supply to the vacuum venturi. Check valve prevents backflow into the nitrogen supply. Constant bleed option provides a continuous supply of inert gas, ensuring that the vent line remains filled with inert gas.  Maximum vacuum up to -26 in. Hg (-88 kPa) and working temperature range from 14 to 160 °F (-10 to 71 °C). These vacuum generator modules are ultrasonic and DI water cleaned to ensure high purity.

Password Login

|

Verification Code Login

Inquiry List

    Your inquiry list is empty

    Send Inquiry

      1 product has been added to your inquiry list.

      Part Number:

      Quantity:

      Your Inquiry List —