Surface Mount Diaphragm Valves, DI and DIH Series

Use surface mounting

DI/DIH Series Diaphragm Valves use SEMI-compliant surface mounting. Featuring either W-seal or C-seal metal hard seals between the valve and the substrate, these diaphragm valves can be installed in integrated gas systems. They support a maximum working pressure of 145 psig (10 bar). A cobalt alloy diaphragm enhances strength and corrosion resistance. The no-packing diaphragm seal ensures high purity, while the absence of dead space facilitates easy purging. Wetted components are electropolished to Ra 5 μin. (0.13 μm).

View Surface Mount Diaphragm Valves, DI and DIH Series

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