Ultra High Purity Filters, FP Series

Suitable for use on high purity piping systems

FP Series Ultra High Purity Filters feature a removal rating of 0.003 µm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.

Features

Excellent chemical compatibility
100% helium leak tested
Particle removal rating of ≥ 0.003 µm, with a filter efficiency greater than 99.9999999% at maximum flow rate

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