Semiconductor and Specialty Gases

Meeting the highest purity standards

Electronic Specialty Gases (ESGs), often referred to as the "lifeblood" of the semiconductor industry, are extensively used in core processes including photolithography, etching, deposition, doping, and cleaning. To ensure product performance and reliability, the semiconductor industry has extremely high purity requirements for electronic specialty gases, typically above 5N (99.999%), which demands that the tubing, valves, and fittings used in fluid systems must have exceptionally high cleanliness levels. If cleanliness standards are not met, it may lead to product quality defects or even contaminate entire production lines, resulting in complete product scrapping. Additionally, since many electronic specialty gases are toxic, hazardous, or flammable, leak-tight performance is critical.

 

FITOK provides valves, fittings, and integrated systems to globally renowned semiconductor industry clients. With accumulated expertise in product knowledge and application experience, we ensure safe, reliable, and efficient production for our customers, earning widespread trust in the industry.

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Why Choose FITOK Products for Semiconductor and Specialty Gas Applications?

  • Comprehensive Product Portfolio

    We offer a complete product portfolio, including fittings, valves, pressure regulators, filters, tubing, and integrated systems such as canister assemblies, gas stick assemblies, and integrated gas systems (IGS), meeting diverse manufacturing process requirements.

  • Strict Material Selection

    SEMI-compliant 316L SS and 316L VAR SS are used as body materials. Material parameters such as chemical composition and grain size are strictly controlled to meet the requirements of high purity (HP) and ultra high purity (UHP) applications.

  • Surface Treatment

    Internal surfaces are electropolished to improve flow path smoothness and form a chromium-rich layer for enhanced corrosion resistance, followed by passivation to remove free iron ions.

  • High Purity Cleaning

    Products are ultrasonically cleaned and dried in NEBB certified cleanrooms using SEMI E49.6-compliant deionized water (DI Water) to ensure no residual deposits.

  • High-Level Cleanrooms

    Our facility features multi-level NEBB-certified cleanrooms. Key processes for UHP products are performed in Class 10 cleanrooms, meeting SEMI cleanliness standards.

  • Helium Leak Testing

    All HP and UHP valves undergo helium leak testing per SEMI-F1 standards before shipment. Our helium leak detectors can achieve a sensitivity of 5×10-12 std. cm3/s.

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