Gas Control Systems

Enable switching and control of gas lines

FITOK offers the CEPR, DPPR, FDR, FPR, and FSR series, which represent high-performance gas control and changeover systems suitable for various industrial and laboratory environments. The CEPR and DPPR series enable automatic switching of gas lines to ensure continuous gas supply. The FDR series provides flexible manual and automatic switching options. FPR series point-of-use panels and FSR series pressure control panels accurately regulate gas pressure, ensuring a safe and stable gas supply. The AGH and AGL series are high-purity and general gas stick assemblies, respectively. The AGH series is designed for high-purity gas applications, such as semiconductor manufacturing, while the AGL series is suited for general industrial applications. CSR series canister assemblies accommodate the packaging and storage of various precursors. All product series feature a modular integrated design to meet diverse application requirements.

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  • General Gas Stick Assemblies, AGL Series

    AGL Series General Gas Stick Assemblies are used for precise pressure control and fluid shutoff. Integrated with a ball valve, a regulator, and a pressure gauge, AGL Series is suitable for use in general gas systems and oxygen-enriched environments.

  • High Purity Gas Stick Assemblies, AGH Series

    AGH series is designed for high purity gases, offering excellent sealing capacity and corrosion resistance. Integrated with a diaphragm valve, regulator, and pressure gauge, it is widely used in semiconductor manufacturing, biomedicine, and laboratories.

  • Point-of-Use Panels, FPR Series

    FPR Series Point-of-Use Panels integrate high performance pressure regulators and and diaphragm valves, enabling precise gas pressure control. Designed for easy installation, these panels are suitable for gas control points in industrial production lines and laboratories, ensuring safe and reliable gas supply management.

  • Pressure Control Panels, FSR Series

    FSR Series Pressure Control Panels effectively reduce high-pressure gas to optimal working levels. Featuring a compact design with built-in safety pressure relief, they enable quick gas source replacement. Compliant with FITOK's special cleaning and packaging standards, these panels are ideal for use in oxygen-enriched environments.

  • Changeover Systems, FDR Series

    FDR Series Changeover Systems, available in multiple models, offer manual or automatic switching according to different gas flow and pressure requirements, thus achieving continuous gas supply. Their modular design provides high flexibility, making them ideal for multi-line switching applications in industrial gas transportation while ensuring system reliability and uninterrupted operation.

  • Canister Assemblies, CSR Series

    In atomic layer deposition (ALD) process, selecting the right precursor is critical for process control and film performance, etc. Meanwhile, based on the precursor properties such as volatility and reactivity, matching the right canister will have a synergistic effect on the process. Through high quality control of the material selection to the molding process, CSR Series Canister Assemblies can accommodate the packaging and storage of most precursors and provide excellent safety and cleanliness for the entire deposition process.

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