Vacuum Generators, VGB and VGM Series

Feature an all-welded construction for improved sealing performance

VGB and VGM Series Vacuum Generators feature an all-welded construction for improved sealing performance and extended service life. They are designed to create a vacuum and establish suction for purging piping systems,which are widely used in the semiconductor industry. The inlet and vent ports of the VGB series offer multiple options, while the VGM series specifies the sizes and types of inlet and vent ports. Maximum vacuum up to -26 in. Hg (-88 kPa), working temperature range from -40 to 160 °F (-40 to 71 °C), and leak rate (helium) < 2x10-10 std cm3/s. Wetted surface roughness machine finished to Ra 15 µin. (0.38 µm). These vacuum generators are ultrasonic and DI water cleaned and finally packaged in ISO calss 4 (FS 209E class 10 equivalent) cleanroom for semiconductor ultra-high purity.

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